Laser-lithographically written micron-wide superconducting nanowire single-photon detectors

Abstract We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. show saturated internal detection efficiencies with wire widths ranging from 0.59 µ m to 1.43 under illumination at 1550 nm. both straight wires, as well meandered structures. Single-photon sensitivity is shown in devices up 4 mm length. Laser-lithographically written allow for fast and easy structuring large areas while maintaining efficiency around 1 m.